The system is specifically designed for microlithography and space optics with a diameter up to 800 mm, 2,000 mm height and 1,500 kg weight. The all-granite, all-air bearing construction provides exceptional rigidity and thermal stability, smooth motion and unrivaled accuracy. Additional alignment unit equipped with heavy duty piezoelectric actuators provides automated alignment with submicron accuracy.
Alignment, Assembly, and Final Inspection of Microlithography Optics
September 5, 2012 By